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NEOL |
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Veeco Aurora 3 Near-field Scanning Optical
Microscope (NSOM) |
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Modified Aurora 3 with Head Scanning |
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Park System cantilever based XE-NSOM |
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Veeco Explorer Scanning Probe Microscope (SPM) platform.
This platform form features open architecture and modulo design, proving
the ultimate flexible for our nanoscale imaging research. |
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PHE-2 Spectroscopic Ellipsometer (200 nm -
1100 nm). |
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Microellipsometer. This is a home-built
equipment invented by Prof. Zhan. Currently, Mr. Alain
Tschimwangan is integrating the software with
the hardware and testing the system. |
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Spectra-Physics Tsunami fs laser (with Prof. Powers and Prof. Haus).
This fs laser oscillator and the Spitfire regenerator are the work horse
for our ultrafast laser applications. The system will be used for THz
imaging, spectroscopy, multi-photon imaging, multi-photon polymerization
and intensive laser pulse propagation studies. |
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Spectra-Physics Spitfire fs laser
regeneration amplifier (with Prof. Powers and Prof. Haus) |
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Coherent DPSS Nd:YAG second harmonic 532 nm green laser
(200 mw) |
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Kimmon He-Cd 442 nm blue laser (300 mw). |
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He-Ne 633 nm red lasers (10 mw, 20 mw
polarized, 30 mw). |
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BNS Liquid Crystal Spatial Light Modulators
(SLMs) |
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Holoeye Spatial Light Modulators (SLMs) |
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Nikon TE-2000U Inverted Microscope. This
microscope provides the ultimate flexibility for multi-port illumination
and multi-port detection. This microscope is used as the work horse for
our biophotonics projects, such as ultrahigh resolution fluorescence
imaging, versatile optical tweezers and polarization enhanced optical
microscopy (PEOM) studies. |
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Spectrometers (Horiba JY IHR-550, Oriel MS257i, OceanOptics
2000HR, SPEX 0.6m) with various coupling mechanisms. |
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Various types of detectors are available,
including Hamamatsu PMTs, Perkin Elmer single photon APD modules, Andor
Tech iDUS TE cooled CCD arrays, etc. Extensive electronics are available
for different detection scheme. This include photon counters, DSP
lock-in amplifiers, analogue lock-in amplifier, AO modulators, EO
modulators, chopper, shutter, signal generators, etc. |
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Nanopositioners. We have several Mad City
Labs Nano-bio low profile nanopositioners that are used for a variety of
nanophotonics and biophotonics projects. |
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COMSOL Server. COMSOL 3.2 with EM, MEMS and
Thermal applications modules, and COMSOL 3.4 with RF, MEMS modules are available for a variety of nanophotonic
devices and MEMS devices simulations. |
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Spectrometer Station. This station is used
to collect and process spectrum collected by various spectrometers. It
also hosts and controls a micro-DAC system for image correlation and FEM
deformation analysis. |
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LabVIEW Station. Professional LabVIEW 6.1 is
available for instrument developments. |
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Image Acquisition Station. Frame grabber and
software for image acquisition and processing. |
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EOP |
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Raith 150 e-beam lithography system (joint
with
Univ. of Cincinnati). A 3-Lith software has recently been added which
will be very useful for our micro-optics, diffractive-optics and
nanophotonics research. |
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Unaxis ShuttleLine Inductive Coupled Plasma
(ICP) Etcher. This equipment is ideal for deep etching into
semiconductor materials such as Silicon. This is currently been used in
the fabrication of micro-optics, diffractive-optics, and nanophotonics
devices for applications such as novel QWIP FPA development and THz
imaging. |
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Denton Vacuum two target magnetron RF sputtering
machine. |
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PECVD |
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Karl Suss MA6/BA6 mask aligner. |
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NEST |
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Hitachi H-7600 TEM. |
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Hitachi S-4800 high resolution SEM (HRSEM). |
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Zeiss EVO-50XVP extended pressure range SEM.
This SEM is intended for biological samples. EDAX is available for
elemental micro-analysis. |
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TA Instruments
MicroThermal (µTA) 2990 thermal AFM. This is an analytical system that
combines the capabilities of AFM with thermal methods to map out
temperature/thermal conductivity. |
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Oxford Diffraction
Xcalibur 3 x-ray diffractometer (XRD).
This is a fully-enclosed single crystal XRD system. |
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Leica EM UC6 Ultramicrotomewith FC6
Attachment. This instrument can perform nanometer sectioning of
biological and materials specimens at both ambient and cryogenic
temperatures. The main function of this instrument is to prepare
specimens for TEM analysis of internal details and microstructure. |